Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410870 | Method of manufacturing semiconductor device | Atsuro SEINO | 2019-09-10 |
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Kazuhiro Harada, Yukinao KAGA, Hideharu Itatani, Hiroshi Ashihara | 2019-08-20 |
| 10366894 | Method of manufacturing semiconductor device, substrate processing device, and recording medium | Yukinao KAGA | 2019-07-30 |