Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361084 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system | Hiroshi Ashihara, Kazuhiro Harada | 2019-07-23 |
| 10290542 | Method of manufacturing semiconductor device | — | 2019-05-14 |
| 10276393 | Method of manufacturing semiconductor device | — | 2019-04-30 |