Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10402963 | Defect detection on transparent or translucent wafers | Yong Zhang, Yiwu Ding | 2019-09-03 |
| 10372113 | Method for defocus detection | Shifang Li, Yong Zhang | 2019-08-06 |
| 10324046 | Methods and systems for monitoring a non-defect related characteristic of a patterned wafer | Tao-Yi Fu, Steve R. Lange, Lisheng Gao, Ping Gu, Sylvain Muckenhirn | 2019-06-18 |