Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed +6 more | 2019-09-10 |
| 10199230 | Methods for selective deposition of metal silicides via atomic layer deposition cycles | Seshadri Ganguli, Bhushan Zope, Xinyu Fu, Avgerinos V. Gelatos, Guoqiang Jian +1 more | 2019-02-05 |
| 10170321 | Aluminum content control of TiAIN films | Wenyu Zhang, Wei V. Tang, CHEN-HAN LIN, Yi Xu, Yu Lei +8 more | 2019-01-01 |