Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424487 | Atomic layer etching processes | Jungmin Ko, Junghoon Kim, Sean S. Kang, Mang-Mang Ling | 2019-09-24 |
| 10403507 | Shaped etch profile with oxidation | Jungmin Ko, Nitin K. Ingle | 2019-09-03 |
| 10354889 | Non-halogen etching of silicon-containing materials | Mandar B. Pandit, Mang-Mang Ling, Nitin K. Ingle | 2019-07-16 |