Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513008 | Chemical mechanical polishing smart ring | Zubin Huang, Stephen A. Wells, Ramesh Gopalan, Gangadhar Sheelavant | 2019-12-24 |
| 10500695 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2019-12-10 |
| 10399202 | Retaining ring for lower wafer defects | Yongqi Hu, Gangadhar Sheelavant, Kadthala Ramaya Narendrnath | 2019-09-03 |
| 10290459 | Magnetron having enhanced cooling characteristics | Govinda Raj, Ramprakash Sankarakrishnan | 2019-05-14 |