Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10399202 | Retaining ring for lower wafer defects | Yongqi Hu, Simon Yavelberg, Gangadhar Sheelavant | 2019-09-03 |
| 10213894 | Method of placing window in thin polishing pad | Yongqi Hu, Thomas Lawrence Terry | 2019-02-26 |
| 10177014 | Thermal radiation barrier for substrate processing chamber components | Govinda Raj, Daniel L. Martin, Robert T. Hirahara, Ashish Bhatnagar, Bopanna Vasanth +1 more | 2019-01-08 |