Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513008 | Chemical mechanical polishing smart ring | Zubin Huang, Stephen A. Wells, Ramesh Gopalan, Simon Yavelberg | 2019-12-24 |
| 10435784 | Thermally optimized rings | Cariappa Baduvamanda, Bopanna Ichettira VASANTHA | 2019-10-08 |
| 10399202 | Retaining ring for lower wafer defects | Yongqi Hu, Simon Yavelberg, Kadthala Ramaya Narendrnath | 2019-09-03 |
| 10403521 | Modular substrate heater for efficient thermal cycling | Cariappa Baduvamanda | 2019-09-03 |