Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10242845 | Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber | Zhongkui Tan, Yiting Zhang, Qian Fu, Ying Wu, Saravanapriyan Sriraman +1 more | 2019-03-26 |
| 10177003 | Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level | Zhongkui Tan, Qian Fu, Ying Wu, Hua Xiang | 2019-01-08 |