Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Jang Seok OH +2 more | 2019-07-30 |
| 10269601 | Chamber leak and gas contaimination detection | Shuo Na, Ilias Iliopoulos, Songfu Jiang, Bo Zhang | 2019-04-23 |