Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Andrew V. LE, Fa Ji, Jang Seok OH, Patrick L. Smith +2 more | 2019-07-30 |
| 10208380 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Andrew V. LE, Jang Seok OH | 2019-02-19 |
| 10192763 | Methodology for chamber performance matching for semiconductor equipment | Lin Zhang, Andy Le | 2019-01-29 |
| 10184904 | Core holder for micron CT observation and experimental method thereof | Yanjie Gong, Mengjun Zhao, Qingong Zhuo, Lin Jiang | 2019-01-22 |