Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Andrew V. LE, Fa Ji, Patrick L. Smith +2 more | 2019-07-30 |
| 10208380 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Andrew V. LE | 2019-02-19 |