Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365216 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Lin Zhang, Xuesong Lu, Fa Ji, Jang Seok OH, Patrick L. Smith +2 more | 2019-07-30 |
| 10330612 | Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures | Lin Zhang, Shuran Sheng | 2019-06-25 |
| 10208380 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Lin Zhang, Xuesong Lu, Jang Seok OH | 2019-02-19 |