Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192763 | Methodology for chamber performance matching for semiconductor equipment | Xuesong Lu, Lin Zhang | 2019-01-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192763 | Methodology for chamber performance matching for semiconductor equipment | Xuesong Lu, Lin Zhang | 2019-01-29 |