Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10309013 | Method and system for identifying a clean endpoint time for a chamber | Ilias Iliopoulos, Jose Albor | 2019-06-04 |
| 10269601 | Chamber leak and gas contaimination detection | Patrick L. Smith, Ilias Iliopoulos, Songfu Jiang, Bo Zhang | 2019-04-23 |