| 10494731 |
Electroplating dynamic edge control |
Gregory J. Wilson, Daniel J. Woodruff, Marvin L. Bernt |
2019-12-03 |
| 10373864 |
Systems and methods for wetting substrates |
Bridger Earl HOERNER, Marvin L. Bernt, Thomas H. Oberlitner, Brian Aegerter, Richard W. Plavidal +3 more |
2019-08-06 |
| 10364506 |
Electroplating apparatus with current crowding adapted contact ring seal and thief electrode |
Gregory J. Wilson |
2019-07-30 |
| 10240248 |
Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control |
Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Gregory J. Wilson, Kyle M. Hanson +1 more |
2019-03-26 |
| 10227707 |
Inert anode electroplating processor and replenisher |
Gregory J. Wilson, John L. Klocke |
2019-03-12 |
| 10227706 |
Electroplating apparatus with electrolyte agitation |
Gregory J. Wilson |
2019-03-12 |
| 10191379 |
Removing photoresist from a wafer |
Kyle M. Hanson, John L. Klocke, Eric J. Bergman, Stuart Crane, Gregory J. Wilson |
2019-01-29 |