Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2019-09-03 |