Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500691 | Substrate processing apparatus and substrate processing method | Masayoshi Imai, Katsuhiko Tokushige, Suguru Ogura, Katsuhide Watanabe, Junji Kunisawa +1 more | 2019-12-10 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2019-11-26 |
| 10438817 | Cleaning apparatus and substrate processing apparatus | Haiyang Xu | 2019-10-08 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Junji Kunisawa, Toru Maruyama, Masayoshi Imai, Koji Maeda, Teruaki HOMBO +1 more | 2019-10-08 |
| 10201888 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2019-02-12 |