Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10201888 | Substrate processing apparatus | Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2019-02-12 |
| 10183374 | Buffing apparatus, and substrate processing apparatus | Toshio Mizuno, Itsuki Kobata | 2019-01-22 |