Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438820 | Substrate processing apparatus, discharge method, and program | Akira Imamura | 2019-10-08 |
| 10201888 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Takuya Inoue | 2019-02-12 |