Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453657 | Apparatus for depositing metal films with plasma treatment | Daping Yao, Hyman Lam, John C. Forster, Jiang Lu, Can Xu +2 more | 2019-10-22 |
| 10400335 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Joel M. Huston | 2019-09-03 |
| 10395916 | In-situ pre-clean for selectivity improvement for selective deposition | Kai Wu, Vikash Banthia, Sang Ho Yu, Feiyue Ma | 2019-08-27 |
| 10373824 | CVD silicon monolayer formation method and gate oxide ALD formation on semiconductor materials | Andrew C. Kummel, Mary Edmonds, Jessica S. Kachian | 2019-08-06 |
| 10283345 | Methods for pre-cleaning conductive materials on a substrate | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Joung Joo Lee +2 more | 2019-05-07 |