Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays | 2019-11-26 |
| 10468233 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Sergio Fukuda Shoji | 2019-11-05 |