Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515812 | Methods of reducing pattern roughness in semiconductor fabrication | Chien-Wei Wang, Ching-Yu Chang, Chin-Hsiang Lin | 2019-12-24 |
| 10418245 | Method for integrated circuit manufacturing with directed self-assembly (DSA) | Chih-Jie Lee | 2019-09-17 |
| 10274847 | Humidity control in EUV lithography | An-Ren Zi, Chin-Hsiang Lin, Ching-Yu Chang | 2019-04-30 |
| 10259907 | Block copolymers with surface-active junction groups, compositions and processes thereof | Ankit Vora, Eri Hirahara, Durairaj BASKARAN, Orest Polishchuk, Melia Tjio +3 more | 2019-04-16 |