Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488766 | Lithography system having invisible pellicle over mask | Chiu-Hsiang Chen, Shih-Ming Chang, Han-Wei Wu, Yung-Sung Yen, Ru-Gun Liu | 2019-11-26 |
| 10418245 | Method for integrated circuit manufacturing with directed self-assembly (DSA) | Joy Cheng | 2019-09-17 |