Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488766 | Lithography system having invisible pellicle over mask | Shih-Ming Chang, Chih-Jie Lee, Han-Wei Wu, Yung-Sung Yen, Ru-Gun Liu | 2019-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488766 | Lithography system having invisible pellicle over mask | Shih-Ming Chang, Chih-Jie Lee, Han-Wei Wu, Yung-Sung Yen, Ru-Gun Liu | 2019-11-26 |