Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388547 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Michael R. Rice, Jeffrey A. Brodine | 2019-08-20 |
| 10359743 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Michael R. Rice | 2019-07-23 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Paul B. Reuter, Izya Kremerman +1 more | 2019-05-07 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2019-01-29 |