Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468276 | Thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky | 2019-11-05 |
| 10233547 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang +1 more | 2019-03-19 |