Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10361116 | Design-aware pattern density control in directed self-assembly graphoepitaxy process | Hsueh-Chung Chen, Lin Hu, Kafai Lai, Chi-Chun Liu, Jed W. Pitera | 2019-07-23 |
| 10340179 | Via formation using directed self-assembly of a block copolymer | Kafai Lai, Chi-Chun Liu, Yongan Xu | 2019-07-02 |
| 10199464 | Techniques for VFET top source/drain epitaxy | Kangguo Cheng, Chi-Chun Liu, Ruilong Xie, Tenko Yamashita, Chun-Chen Yeh | 2019-02-05 |
| 10170582 | Uniform bottom spacer for vertical field effect transistor | Michael P. Belyansky, Ekmini Anuja De Silva, Tenko Yamashita | 2019-01-01 |
| 10170585 | Semiconductor devices having equal thickness gate spacers | Ruilong Xie | 2019-01-01 |