Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395941 | SADP method with mandrel undercut spacer portion for mandrel space dimension control | Ravi Prakash Srivastava | 2019-08-27 |
| 10361116 | Design-aware pattern density control in directed self-assembly graphoepitaxy process | Cheng Chi, Lin Hu, Kafai Lai, Chi-Chun Liu, Jed W. Pitera | 2019-07-23 |
| 10340180 | Merge mandrel features | Martin O'Toole, Terry A. Spooner, Jason E. Stephens | 2019-07-02 |
| 10276434 | Structure and method using metal spacer for insertion of variable wide line implantation in SADP/SAQP integration | James J. Kelly, Yann Mignot, Cornelius Brown Peethala, Lawrence A. Clevenger | 2019-04-30 |
| 10168075 | Critical dimension shrink through selective metal growth on metal hardmask sidewalls | Hong He, Juntao Li, Chih-Chao Yang, Yunpeng Yin | 2019-01-01 |