Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381248 | Auto-correction of electrostatic chuck temperature non-uniformity | Eric A. Pape, Keith Gaff | 2019-08-13 |
| 10224187 | Detecting partial unclamping of a substrate from an ESC of a substrate processing system | Dmitry Opaits, Jorge Luque | 2019-03-05 |