Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438849 | Microwave anneal to improve CVD metal gap-fill and throughput | He Ren, Jie Zhou, Guannan Chen, Michael W. Stowell, Mehul Naik +3 more | 2019-10-08 |
| 10354882 | Low thermal budget crystallization of amorphous metal silicides | Xianmin Tang, Sundar Ramamurthy, Jerome Machillot | 2019-07-16 |
| 10204764 | Methods for forming a metal silicide interconnection nanowire structure | Annamalai Lakshmanan, Kaushal K. Singh, Andrew Cockburn, Ludovic Godet, Paul F. Ma +1 more | 2019-02-12 |