Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488567 | Faceted mirror for EUV projection lithography and illumination optical unit with same | Sarina Wunderlich | 2019-11-26 |
| 10416049 | Processing of solid micron sized particles for rapid deposition on substrate surfaces with uniform particle distribution | Robert Furstenberg, Viet K. Nguyen, R Andrew McGill, Chris Kendziora, Michael Papantonakis | 2019-09-17 |
| 10403506 | Separation of workpiece with three material removal stages | Christoph Kamseder, Franco Mariani, Andreas Bauer | 2019-09-03 |
| 10388610 | Electronic chip inspection by backside illumination | — | 2019-08-20 |
| 10379444 | Illumination optic for EUV projection lithography | Matthias Mueller, Stefan Seitz | 2019-08-13 |
| 10296038 | Remote control | Ferdinand Maier | 2019-05-21 |
| 10262959 | Semiconductor devices and methods of forming thereof | Evelyn Napetschnig, Ulrike Fastner, Alexander Heinrich | 2019-04-16 |
| 10238123 | Device and method for transferring sausage portions | Peter Willburger, Michael Heim, Siegfried Reutter | 2019-03-26 |
| 10186438 | Method and apparatus for use in wafer processing | Gerald Lackner, Walter Leitgeb, Michael Lecher | 2019-01-22 |