Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10436638 | Light receiver having geiger-mode avalanche photodiodes and method for reading out | Klaus Clemens, Gottfried Hug | 2019-10-08 |
| 10379444 | Illumination optic for EUV projection lithography | Matthias Mueller, Thomas Fischer | 2019-08-13 |