Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488567 | Faceted mirror for EUV projection lithography and illumination optical unit with same | Thomas Fischer | 2019-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488567 | Faceted mirror for EUV projection lithography and illumination optical unit with same | Thomas Fischer | 2019-11-26 |