Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418277 | Air gap spacer formation for nano-scale semiconductor devices | Kangguo Cheng, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen +2 more | 2019-09-17 |
| 10242865 | Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices | Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha | 2019-03-26 |
| 10236176 | Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices | Son V. Nguyen, Deepika Priyadarshini, Hosadurga Shobha | 2019-03-19 |