Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Yulu Chen, Francis Goodwin, Lei Sun, Obert R. Wood, II | 2019-11-05 |
| 10191213 | Shielding structures between optical waveguides | John J. Ellis-Monaghan, Jeffrey P. Gambino, Mark D. Jaffe, Kirk D. Peterson | 2019-01-29 |