Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Yulu Chen, Jed H. Rankin, Lei Sun, Obert R. Wood, II | 2019-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Yulu Chen, Jed H. Rankin, Lei Sun, Obert R. Wood, II | 2019-11-05 |