Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Francis Goodwin, Jed H. Rankin, Lei Sun, Obert R. Wood, II | 2019-11-05 |
| 10332745 | Dummy assist features for pattern support | Lei Sun, Ruilong Xie, Wenhui Wang, Erik Verduijn, Zhengqing John Qi +2 more | 2019-06-25 |