Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10366879 | Dry and wet etch resistance for atomic layer deposited TiO2 for SIT spacer application | Cornelius Brown Peethala, Ekmini Anuja De Silva | 2019-07-30 |
| 10249512 | Tunable TiOxNy hardmask for multilayer patterning | Ekmini Anuja De Silva, Nelson Felix, Sivananda K. Kanakasabapathy | 2019-04-02 |