Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490400 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada | 2019-11-26 |
| 10290492 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yushin Takasawa, Hiroki HATTA | 2019-05-14 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Hajime Karasawa, Ryota Horiike, Naoharu Nakaiso, Yoshitomo HASHIMOTO | 2019-02-05 |