Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490400 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto | 2019-11-26 |
| 10340134 | Semiconductor device manufacturing method, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2019-07-02 |
| 10329366 | Ethylene/α-olefin copolymers and lubricating oils | Koji Endo, Tomoaki Mizukawa, Sadahiko Matsuura | 2019-06-25 |
| 10290492 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yushin Takasawa, Satoshi Shimamoto, Hiroki HATTA | 2019-05-14 |