Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose, Ryota Horiike, Naoharu Nakaiso, Yoshitomo HASHIMOTO | 2019-02-05 |