Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262872 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takahiro MIYAKURA, Atsushi Moriya, Kensuke HAGA | 2019-04-16 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose, Hajime Karasawa, Ryota Horiike, Yoshitomo HASHIMOTO | 2019-02-05 |