Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262857 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yugo Orihashi | 2019-04-16 |
| 10262872 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takahiro MIYAKURA, Naoharu Nakaiso, Kensuke HAGA | 2019-04-16 |