Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497561 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Ryota Horiike | 2019-12-03 |
| 10229829 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Ryota Horiike | 2019-03-12 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose, Hajime Karasawa, Ryota Horiike, Naoharu Nakaiso | 2019-02-05 |