Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438771 | Measurement device, calibration method of measurement device, and calibration member | Michio Hatano, Yoshinori Nakayama, Masaru Matsuzaki, Yoshinori Momonoi, Zhigang Wang | 2019-10-08 |
| 10393509 | Pattern height measurement device and charged particle beam device | Katsuhiro Sasada, Takenori Hirose, Shou Takami | 2019-08-27 |
| 10184790 | Pattern measurement method and pattern measurement device | Hideo Sakai, Katsuhiro Sasada | 2019-01-22 |