Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10393509 | Pattern height measurement device and charged particle beam device | Hiroki Kawada, Katsuhiro Sasada, Shou Takami | 2019-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10393509 | Pattern height measurement device and charged particle beam device | Hiroki Kawada, Katsuhiro Sasada, Shou Takami | 2019-08-27 |