Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10393509 | Pattern height measurement device and charged particle beam device | Hiroki Kawada, Takenori Hirose, Shou Takami | 2019-08-27 |
| 10184790 | Pattern measurement method and pattern measurement device | Hiroki Kawada, Hideo Sakai | 2019-01-22 |