Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488755 | Pattern forming method, photo mask manufacturing method, and electronic device manufacturing method | Hidehiro Mochizuki, Akira Takada | 2019-11-26 |
| 10444627 | Pattern formation method, active light-sensitive or radiation-sensitive resin composition, resist film, production method for electronic device using same, and electronic device | Hiroo Takizawa, Toru Fujimori, Wataru Nihashi, Natsumi Yokokawa | 2019-10-15 |
| 10423068 | Active-light-sensitive or radiation-sensitive resin composition, active-light-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device | — | 2019-09-24 |