Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488755 | Pattern forming method, photo mask manufacturing method, and electronic device manufacturing method | Hidehiro Mochizuki, Shuji Hirano | 2019-11-26 |
| 10295328 | Method of calibrating interferometer and interferometer using the same | — | 2019-05-21 |
| 10190686 | Cover member | Tomoyoshi Nagamachi, Shinichi Sutou | 2019-01-29 |